Reticles

Material

Substrate material selected float glass, BK7 optical glass, ceramics, aluminium oxide and others.
Low CTE: quartz glass, borosilicate, Robax, Zerodur.
Thickness of substrate 0,5 - 8 mm

Coating

- optical density

- reflection

- layer thickness

vacuum deposited chrome

1.5 - 3 (±5%) at 400-900 nm

< 60% at 400-900 nm

200÷4000 Å

Shape of reticle

any

Reticle processing

scribed and broken, laser cutting, grinding
Outbreaks on edges < 0.1 mm
Grinded, polished glass edges parallelism 0.015 mm/m

 

Pattern

Coating Aluminum, silica, chrome, anti-reflective chrome and others on request
Mark period ratio deviation ±2.5%
Max. graduation accuracy 2 arc. sec
Graduation coaxiality to outside diameter < 0.1 mm
Grating pitch from 8 μm

 

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